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SEMI E87-0706E (editorial revision)
SEMI E122-0303 (first published - replaces SEMI E30
orgで入手可能となる。初版は1990年発行。前版は2002年11月発行。
E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1102 - Superseded When this is doneNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical
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